Igwe igwe MEMS na-ejikarị MEMS microcapacitive sensọ, sekit mgbanwe micro-integrated, ọnụ ụlọ acoustic, na sekit mgbochi nnyonye anya RF.Isi microcapacitance MEMS na-agụnye diaphragm silicon na electrode azụ silicon maka ịnata ụda.Silicon diaphragm nwere ike nata mgbaàmà ọdịyo ozugbo wee bufee ya na sekit agbakwunyere micro site na ihe mmetụta micro-capacitance MEMS.Sekit micro-integrated na-atụgharị akara ngosi eletriki ọdịyo dị elu na Amplified n'ime mgbaàmà eletrik dị ala, nke RF mgbochi mkpọtụ sekit na-enyocha n'otu oge, wee wepụta akara ọkụ eletrik dabara na mbụ okirikiri, " acoustic-electrical” ntughari agwụla.Site n'ịgụ akara ọkụ eletrik, a na-enweta njirimara nke ụda.
Oge nzipu: Dec-06-2022
